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Semiconductor Components Manufacturing

Precision CNC machining for semiconductor equipment manufacturers, specializing in advanced ceramic, glass, metal, and engineering plastic components for high-precision applications.

Semiconductor Manufacturing Services

Explore our core semiconductor manufacturing services. Below are some of the most common processes we provide for semiconductor manufacturing and wafer processing.

Wafer Processing

Wafer Thinning / Back Grinding
– Precision back grinding and thinning services for silicon, SiC, sapphire, and compound semiconductor wafers.

CMP (Chemical Mechanical Planarization)
– Precision wafer planarization for advanced semiconductor manufacturing.

Wafer Dicing
– High-precision wafer singulation for semiconductor substrates using advanced dicing technologies.

Wafer Cleaning
– Particle removal and ultra-clean wafer cleaning processes for semiconductor manufacturing.

Laser Micromachining
– Precision laser scribing, drilling, cutting, and micromachining for semiconductor wafers and advanced substrates.

Thin Film & Functional Coatings

ITO Coating
– Transparent conductive oxide coating for optical, display, and semiconductor applications.

PVD Coating
– Physical Vapor Deposition for functional metal and dielectric thin films.

CVD Coating
– Chemical Vapor Deposition for conformal thin films with excellent material performance.

ALD Coating
– Atomic Layer Deposition for ultra-thin, highly uniform coatings with atomic-level thickness control.

Ceramic Metallization
– Metal deposition on ceramic substrates for electrical interconnection and packaging applications.

Thermal Oxidation
– High-quality silicon dioxide (SiO₂) growth for insulation, passivation, and semiconductor device fabrication.

Semiconductor Component Library

Discover representative semiconductor components manufactured for wafer processing equipment. This library features common machining examples and is continuously expanding as new applications and customer projects are added.

Chemical Mechanical Planarization (CMP)

Retaining Ring
– Precision machining for demanding flatness and concentricity requirements.

Clamp Ring
– Manufactured for reliable wafer clamping and repeatable performance.

Wafer Chuck
– High-precision machining for critical wafer support components.

Pocket Wafer
– Custom-machined wafers for equipment setup and process qualification.

Backing Plate
–Engineered for structural stability and dimensional accuracy.

Etching Systems (Etch)

Focus Ring
– Precision ceramic machining for plasma-facing components.

Edge Ring
– Designed for tight dimensional control and long service life.

Chamber Shield
– Built to withstand harsh plasma processing environments.

Chamber Liner
– Large-format precision machining for chamber protection components.

ESC Clamp Ring
– Machined for demanding vacuum and plasma applications.

Gas Ring
– Precision gas distribution features with complex machining geometry.

Thin Film Deposition Systems

Susceptor
– Precision machining for high-temperature deposition environments.

Shower Head
– Complex multi-hole machining with tight positional tolerances.

Gas Distribution Plate
–Precision hole patterns for uniform process gas distribution.

Heater Plate
– Manufactured for excellent flatness and thermal stability.

Heater Cover
– Precision-machined protective components for deposition systems.

Gas Nozzle
– High-precision micro-feature machining for process gas delivery.

Electrostatic Chuck (ESC)
– Critical precision surfaces for advanced wafer processing.

Wafer Handling & Transfer Systems

Lift Pin
– Precision cylindrical machining with tight dimensional control.

End Effector
– Lightweight precision components for robotic wafer handling.

Robot Finger
– High-repeatability machining for automated handling systems.

Vacuum Chuck
– Precision sealing surfaces for reliable wafer holding.

Alignment Ring
– Manufactured for accurate wafer positioning and repeatability.

Alignment Pin
– Precision-ground alignment features for critical assemblies.

Guide Pin
– Tight tolerance machining for smooth linear guidance.

Vacuum & Chamber Components

Quartz Window
– Precision-machined optical components for vacuum environments.

View Port
– Vacuum-compatible precision machining for inspection systems.

Bell Jar
– Large quartz machining for demanding vacuum applications.

Spacer
– Precision spacing components with tight thickness control.

Insulator Plate
– High-precision ceramic machining for electrical isolation.

Vacuum Feedthrough Holder
– Precision interfaces for vacuum feedthrough assemblies.

Chamber Hardware
– Custom precision components for semiconductor vacuum systems.

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